Plasma properties, deposition and etching editors, J.J. Pouch and S.A. Alterovitz

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Publication details: Zurich, Switerland Trans Tech Publications c1993Description: x, 742 p. : ill. ; 25 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.044 POU (Browse shelf(Opens below))	Available		387967

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Includes bibliographical references and index

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