Plasma electronics : applications in microelectronic device fabrication T. Makabe, Z. Petrović

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Publication details: New York Taylor & Francis c2006Description: 339 p. : ill. ; 25 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.044 MAK (Browse shelf(Opens below))	Available		145031

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Previous	621.0420954 MAC Proceedings of the 1st national conference on advances in energy research (AER-2006), December 4-5, 2006	621.044 GRI Cold plasma in materials fabrication : from fundamentals to applications	621.044 KAW Industrial plasma technology : applications from environmental to energy technologies	621.044 MAK Plasma electronics : applications in microelectronic device fabrication	621.044 POP High density plasma sources : design, physics, and performance	621.044 POU Plasma properties, deposition and etching	621.044 RAD Laser-induced plasmas and applications	Next

Includes bibliographical references and index

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