Plasma electronics : applications in microelectronic device fabrication T. Makabe, Z. Petrović

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Publication details: New York Taylor & Francis c2006Description: 339 p. : ill. ; 25 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.044 MAK (Browse shelf(Opens below))	Available		145031

Includes bibliographical references and index

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