Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States Daniel J.C. Herr, editor ; sponsored by SPIE; cooperating organization, SEMATECH Inc

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Publication details: Bellingham, Wash SPIE c2010Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381531 HER (Browse shelf(Opens below))	Available		276738

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