Advances in resist materials and processing technology XXVII : 22-24 February 2010, San Jose, California, United States Robert D. Allen, Mark H. Somervell, editors, ; sponsored by SPIE ; cooperating organization, SEMATECH Inc. (United States)

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Publication details: Bellingham, Wash SPIE 2010Description: 2 v. (various pagings) : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381531 ALL (Browse shelf(Opens below))	Available		276821
Anna Centenary Library	621.381531 ALL (Browse shelf(Opens below))	Available		276822

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