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Advanced processes for 193-nm immersion lithography Yayi Wei, Robert L. Brainard

By: Contributor(s): Publication details: Bellingham, Wash SPIE 2009Description: xix, 315 p. : ill. ; 26 cmISBN:
  • 9780819475572
ISSN:
  • 2008050743
Subject(s): DDC classification:
  • 621.381531 WEI
Item type: Books
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