Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai

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Publication details: Cambridge Cambridge University Press 2000Description: xvii, 323 p. : ill. ; 25 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.395 SUZ (Browse shelf(Opens below))	Available		97514

Includes bibliographical references and index

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