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Photomask technology 2007 : 18-21 September, 2007, Monterey, California, USA Robert J. Naber, Hiroichi Kawahira, editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE

Contributor(s): Publication details: Bellingham, WA SPIE c2007Description: 3 v. : ill. (some col.) ; 28 cmISBN:
  • 9780819468871
Subject(s): DDC classification:
  • 621.36 NAB.6730
Item type: Books
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Some earlier conferences have title: Symposium on Photomask Technology. Includes bibliographical references and author index

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