Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA)

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Publication details: Bellingham, WA SPIE c2008Description: 3 v. : ill. (some col. ) ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621. 381531 LEV (Browse shelf(Opens below))	Available		277629
Anna Centenary Library	621. 381531 LEV (Browse shelf(Opens below))	Available		277630

Includes bibliographical references and author index

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