Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, chairs/editors ; sponsored by SPIE Europe ; cosponsored by Conseil general du Bas-Rhin (France)... [et al. ] ; cooperating organizations CNOP--Comité national d'optique et de photonique (France)... [et al. ]

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Publication details: Bellingham, WA SPIE 2006Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	681.25 GOR (Browse shelf(Opens below))	Available		423077

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Includes bibliographical references and author index

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