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Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August, 2001, San Diego, USA Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored... by SPIE--the International Society for Optical Engineering

Contributor(s): Publication details: Bellingham, WA SPIE c2001Description: ix, 294 p. : ill. ; 28 cmISBN:
  • 9780819441638
ISSN:
  • 2002280022
Subject(s): DDC classification:
  • 621.381045 DUP
Item type: Books
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