Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30-31 July 2000, San Diego, USA Ghanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored... by SPIE--the International Society for Optical Engineering

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Publication details: Bellingham, WA SPIE c2000Description: ix, 328 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381045 AL (Browse shelf(Opens below))	Available		422964

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Includes bibliographical references and index

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