Optical microlithography XXII : 24-27 February 2009, San Jose, California, United States Harry J. Levinson, Mircea V. Dusa, editors ; sponsored by SPIE ; cooperating organization, SEMATECH Inc. (United States)

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Publication details: Bellingham, WA SPIE c2009Description: 2 v. : ill. (some col. ) ; 28 cmISBN:

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Item type: Books

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Holdings
Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	670 LEV (Browse shelf(Opens below))	Available		423026
Anna Centenary Library	670 LEV (Browse shelf(Opens below))	Available		423027

Includes bibliographical references and author index

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