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Optical microlithography XVIII : 1-4 march, 2005, San Jose, California, USA Bruce W. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH

Contributor(s): Publication details: Bellingham, WA SPIE c2005Description: 3 v. : ill. (some col. ) ; 28 cmISBN:
  • 9780819457349
Subject(s): DDC classification:
  • 621.381531 SMI
Item type: Books
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Includes bibliographical references and author index

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