Optical microlithography XVIII : 1-4 march, 2005, San Jose, California, USA Bruce W. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH

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Publication details: Bellingham, WA SPIE c2005Description: 3 v. : ill. (some col. ) ; 28 cmISBN:

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Holdings
Current library	Call number	Status	Barcode
Anna Centenary Library	621. 381531 SMI (Browse shelf(Opens below))	Available	423023
Anna Centenary Library	621. 381531 SMI (Browse shelf(Opens below))	Available	423024
Anna Centenary Library	621. 381531 SMI (Browse shelf(Opens below))	Available	423025

Includes bibliographical references and author index

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