Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA Bruce W. Smith, chair/editor ; sponsored... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

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Publication details: Bellingham, WA SPIE 2004Description: 3 v. (xxiii, 2008 p. ) : ill. (some col. ) ; 28 cmISBN:

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Holdings
Current library	Call number	Status	Barcode
Anna Centenary Library	621. 366 SMI (Browse shelf(Opens below))	Available	422935
Anna Centenary Library	621. 366 SMI (Browse shelf(Opens below))	Available	422936
Anna Centenary Library	621. 366 SMI (Browse shelf(Opens below))	Available	422937

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Includes bibliographical references and index

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