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Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.]

Contributor(s): Publication details: Bellingham, WA SPIE c1999Description: ix, 184 p. : ill. ; 28 cmISBN:
  • 819434809
ISSN:
  • 266007
Subject(s): DDC classification:
  • TK7874.75 .M86 1999 621.39/5
Item type: Books
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Includes bibliographical references and index

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