EUV lithography Vivek Bakshi, editor

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Publication details: Bellingham, WA SPIE, Wiley-Interscience 2009Description: xxvii, 673 p. : ill. ; 27 cmISBN:

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Item type: Books

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Holdings
Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.3815 BAK (Browse shelf(Opens below))	Available		129779
Anna Centenary Library	621.3815 BAK (Browse shelf(Opens below))	Available		417711

Includes bibliographical references and index

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