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Emerging lithographic technologies VIII : 24-26 February, 2004, Santa Clara, California, USA R. Scott Mackay, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, [and] International SEMATECH

Contributor(s): Publication details: Bellingham, WA SPIE 2004Description: 2 v. (xxxviii, 1110 p.) : ill. ; 28 cmISBN:
  • 9780819452870
Subject(s): DDC classification:
  • 686.2315 MAC
Item type: Books
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