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Handbook of microlithography, micromachining, and microfabrication P. Rai-Choudhury, editor

Contributor(s): Publication details: Bellingham, WA Institution of Electrical Engineers, SPIE Optical Engineering Press c1997Description: 768 p. : ill. ; 26 cmISBN:
  • 0819423785
ISSN:
  • 96040237
Subject(s): DDC classification:
  • 670 CHO
Item type: Books
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Holdings
Current library Call number Status Date due Barcode
Anna Centenary Library 670 CHO (Browse shelf(Opens below)) Available 424292

Includes bibliographical references and indexes

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