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17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November 2000, Munich, Germany Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering

Contributor(s): Publication details: Bellingham, WA SPIE c2001Description: x, 192 p. : ill. ; 28 cmISBN:
  • 9780819440396
Subject(s): DDC classification:
  • 621.3815 BEH
Item type: Books
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