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Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan
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Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan
Alek C. Chen ... [et al.] (Eds.) ; spons. and publ. by SPIE - The International Society for Optical Engineering
By:
Chen, Alek C
Contributor(s):
Society of Photo-optical Instrumentation Engineers (United States)
Publication details:
Bellingham, WA
SPIE
2009
Description:
1 Band : Ill
ISBN:
9780819479099
ISSN:
2011293380
Subject(s):
Lithography, Electron beam - Congresses
Masks (Electronics) - Congresses
Microlithography - Industrial applications - Congresses
X-ray lithography - Congresses
X-rays - Industrial applications - Congresses
DDC classification:
621.3815 CHE
Item type:
Books
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