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Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Contributor(s): Publication details: Bellingham, WA SPIE c2003Description: vii, 208 p. : ill. ; 28 cmISBN:
  • 9780819450562
ISSN:
  • 2004298721
Subject(s): DDC classification:
  • 681.4 BER
Item type: Books
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