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Introduction to microfabrication Sami Franssila

By: Publication details: Hoboken, NJ J. Wiley c2004Description: xvii, 401 p. : ill. ; 26 cmISBN:
  • 9780470851067
ISSN:
  • 2004004940
Subject(s): DDC classification:
  • 621.3 FRA
Item type: Books
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