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Instrumentation, metrology, and standards for nanomanufacturing III : 3-5 August 2009, San Diego, California, United States Michael T. Postek, John A. Allgair, editors ; sponsored by SPIE ; technical cosponsor, NIST--National Institute of Standards and Technology (United States)

Contributor(s): Publication details: Bellingham, WA SPIE 2009Description: ix, 1 v. (various pagings) : ill. ; 28 cmISBN:
  • 9780819476951
ISSN:
  • 2010286669
Subject(s): DDC classification:
  • 620.5 POS
Item type: Books
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