Handbook of VLSI microlithography : principles, technology, and applications [edited] by John N. Helbert

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Publication details: Park Ridge, NJ Noyes Publications/William Andrew Pub 2001Edition: 2nd edDescription: xxi, 1001 p. : ill. ; 24 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381531 HEL (Browse shelf(Opens below))	Available		340286

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Previous	621.381531 FLA.1 Optical microlithography XX : 27 February - 2 march 2007, San Jose, California, USA	621.381531 FLA.1 Optical microlithography XX : 27 February - 2 march 2007, San Jose, California, USA	621.381531 GEB Networks-on-chips : theory and practice	621.381531 HEL Handbook of VLSI microlithography : principles, technology, and applications	621.381531 HER Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA	621.381531 HER Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA	621.381531 HER Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States	Next

Includes bibliographical references and index

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