Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Werner Kern

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Publication details: Norwich, NY William Andrew 2008Edition: 2nd edDescription: xxvi, 718 p. : ill. ; 24 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 REI (Browse shelf(Opens below))	Available		340347

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Includes bibliographical references and index

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