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Handbook of advanced plasma processing techniques R.J. Shul, S.J. Pearton (eds.)

By: Contributor(s): Publication details: Berlin Springer c2000Description: xvi, 653 p. : ill. ; 24 cmISBN:
  • 9783540667728
ISSN:
  • 38824
Subject(s): DDC classification:
  • 621.044 SHU
Item type: Books
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