Fundamental principles of optical lithography : the science of microfabrication Chris Mack

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Publication details: Hoboken, NJ Wiley 2007Description: xvii, 515 p. : ill. ; 25 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381531 MAC (Browse shelf(Opens below))	Available		131961

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Includes bibliographical references and index

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