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Fundamental aspects of silicon oxidation Yves J. Chabal (ed.)

Contributor(s): Publication details: Berlin Springer c2001Description: xiii, 260 p. : ill. (some col.) ; 24 cmISBN:
  • 9783540416821
ISSN:
  • 2001020054
Subject(s): DDC classification:
  • 546.6832 CHA
Item type: Books
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