Nanolithography and patterning techniques in microelectronics edited by David G. Bucknall

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Publication details: Cambridge ; Boca Raton, FL CRC Press, Woodhead Pub 2005Description: xiv, 409 p. : ill. ; 24 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381531 BUC (Browse shelf(Opens below))	Available		351649

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Includes bibliographical references and index

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