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Nano- and microtechnology : materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by RMIT University (Australia) ... [et al.] ; cooperating organizations, Swinburne University of Technology (Australia) ... [et al.]

Contributor(s): Publication details: Bellingham, WA SPIE c2002Description: xi, 476 p. : ill. ; 28 cmISBN:
  • 9780819447319
ISSN:
  • 2003278131
Subject(s): DDC classification:
  • 621.381 SOO
Item type: Books
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