EUV sources for lithography [edited by] Vivek Bakshi

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Publication details: Bellingham, WA SPIE Press 2006Description: xxxv, 1057 p. : illISBN:

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Holdings
Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.364 BAK (Browse shelf(Opens below))	Available		277013

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Previous	621.3622 GAB Nanophotonic materials III : 13-14 August 2006, San Diego, California, USA	621.3622 HEM Fluctuations and noise in photonics and quantum optics III : 24-26 May, 2005, Austin, Texas, USA	621.3622 TAT Fourth-generation x-ray sources and optics III : 3-4 August, 2005, San Diego, California, USA	621.364 BAK EUV sources for lithography	621.364 HUF Selected papers on ultraviolet optics and technology	621.364 HUF Selected papers on ultraviolet optics and technology	621.365 ALI Photonic and phononic crystal materials and devices X : 26-28 January 2010, San Francisco, California, United States	Next

Includes bibliographical references and index

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