EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008, Dresden, Germany Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.]

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Publication details: Bellingham, WA SPIE c2008Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38173 BEH (Browse shelf(Opens below))	Available		276677

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