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Emerging lithographic technologies XI 27 February-1 march 2007, San Jose, California, USA
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Emerging lithographic technologies XI 27 February-1 march 2007, San Jose, California, USA
Michael J.Lercel
By:
Lercel, Michael J
Publication details:
California
SPIE - Proceeding
2007
Description:
various pagings. ; 30 cm
ISBN:
9780819466365
Subject(s):
Lithography, Electron beam
Lithography--Industrial applications
DDC classification:
621.381531 LER
Item type:
Books
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