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Dielectric films for advanced microelectronics edited by Mikhail Baklanov, Martin Green, and Karen Maex

Contributor(s): Publication details: Chicester, West Sussex John Wiley & Sons c2007Description: xxii, 486 p. : ill. ; 26 cmISBN:
  • 9780470013601
ISSN:
  • 2006030740
Subject(s): DDC classification:
  • 621.381 BAK
Item type: Books
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