Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

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Publication details: Bellingham, Wash SPIE c2004Description: xxxiv, 566 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 CHI (Browse shelf(Opens below))	Available		417650

Includes bibliographical references and index

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