Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

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Publication details: Bellingham, Wash SPIE c2002Description: xvii, 832 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38173 COU (Browse shelf(Opens below))	Available		276925

Includes bibliographical references and index

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