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Design, test, integration and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

Contributor(s): Publication details: Bellingham, Wash SPIE c2001Description: xvi, 558 p. : ill. ; 28 cmISBN:
  • 9780819441096
ISSN:
  • 2002265434
Subject(s): DDC classification:
  • 621.381 COU
Item type: Books
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