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Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
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Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]
Contributor(s):
Courtois, B
Publication details:
Bellingham, Wash
SPIE--the International Society for Optical Engineering
c2000
Description:
xv, 596 p. : ill. ; 28 cm
ISBN:
9780819436450
ISSN:
2001267594
Subject(s):
Microelectromechanical systems - Congresses
Microelectronic packaging - Congresses
Micromachining - Congresses
Optoelectronic devices - Congresses
DDC classification:
621.381 PRO
Item type:
Books
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621.381 PRE
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621.381 PRE
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Design, test, integration and packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
621.381 PUG
Experiments manual to accompany Grob's basic electronics
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Experiments manual to accompany Grob's basic electronics: fundamentals of DC/AC circuits
621.381 RAI
MEMS and MOEMS technology and applications
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