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Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et. al]

Contributor(s): Publication details: Bellingham, Wash SPIE c1999Description: 2 v. (xix, 1192 p.) : ill. ; 28 cmISBN:
  • 9780819431547
ISSN:
  • 689203
Subject(s): DDC classification:
  • 621.381 COV
Item type: Books
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