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Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

Contributor(s): Publication details: Bellingham, Wash SPIE c2002Description: xv, 628 p. : ill. (some col.) ; 28 cmISBN:
  • 9780819444394
ISSN:
  • 2002512515
Subject(s): DDC classification:
  • 621.3672 STA
Item type: Books
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