Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH

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Publication details: Bellingham, Wash SPIE c2005Description: xxxv, 438 p. : ill. (some col.) ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 LIE (Browse shelf(Opens below))	Available		417668

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Includes bibliographical references and author index

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