Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

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Publication details: Bellingham, Wash SPIE c2004Description: xxviii, 302 p. : ill., ports. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 LIE (Browse shelf(Opens below))	Available		417667

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Includes bibliographical references and index

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