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Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

Contributor(s): Publication details: Bellingham, Wash SPIE c2004Description: xxx, 248 p. : ill. ; 28 cmISBN:
  • 9780819452917
ISSN:
  • 2004303114
Subject(s): DDC classification:
  • 660.2815 TOB
Item type: Books
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