MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

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Publication details: Bellingham, WA SPIE c2003Description: xlvi, 368 p. : ill. (some col.) ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 SMI (Browse shelf(Opens below))	Available		277751
Anna Centenary Library	621.381 SMI (Browse shelf(Opens below))	Available		423910

Includes bibliographical references and index

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