MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, USA M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

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Publication details: Bellingham, WA SPIE c2001Description: xxv, 350 p. : ill. ; 28 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 MOT (Browse shelf(Opens below))	Available		277498

Includes bibliographical references and index

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