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Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany Christophe Gorecki, chair/editor ; sponsored by EOS--European Optical Society ... [et al.]

Contributor(s): Publication details: Bellingham, WA SPIE c1999Description: v, 186 p. : ill. ; 28 cmISBN:
  • 9780819433114
ISSN:
  • 708945
Subject(s): DDC classification:
  • 621.381 GOR
Item type: Books
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Current library Call number Status Date due Barcode
Anna Centenary Library 621.381 GOR (Browse shelf(Opens below)) Available 277420

Includes bibliographical references and index

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