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Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

Contributor(s): Publication details: Bellingham, WA SPIE c2001Description: v, 176 p. : ill. ; 28 cmISBN:
  • 9780819440952
ISSN:
  • 2002265278
Subject(s): DDC classification:
  • 620.0044 GOR
Item type: Books
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