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Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania
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Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania
Armin Sulzmann
By:
Armin, Sulzmann
Publication details:
Bellingham, WA
SPIE
1997
Description:
x,238 p. ; 30 cm
ISBN:
9780819426345
Subject(s):
Microelectromechanical systems
Microfabrication
DDC classification:
629.892 SUL
Item type:
Books
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Anna Centenary Library
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